Radiographic image conversion panel and production method thereof

ABSTRACT

A radiographic image conversion panel containing a substrate having thereon a phosphor layer formed by a vapor-accumulating method, wherein the phosphor layer has a thickness distribution of not more than ±20%, the thickness distribution being defined by the formula: ((D max −D min )/(D max +D min ))×100, provided that D max  is a maximum thickness of the phosphor layer; and D min  is a minimum thickness of the phosphor layer.

FIELD OF THE INVENTION

The present invention relates to a radiographic image conversion panel,in which a stimulable phosphor substance layer is formed on a support bymeans of a vapor-accumulating method, and a manufacturing method of theradiographic image conversion panel.

BACKGROUND OF THE INVENTION

In recent years, a radiographic image conversion panel in which astimulable phosphor substance is formed on a support is utilized forrecording radiographic images. In this method, a portion of theradiation transmitted through a subject for image taking is absorbed bya stimulable phosphor substance layer formed on a radiographic imageconversion panel. Thereafter, excitation light such as laser light isirradiated on the stimulable phosphor layer to make radiation energyaccumulated in a stimulable phosphor layer emit as phosphor light whichis detected, resulting in formation of images.

As a method to form a stimulable phosphor substance layer on such aradiographic image conversion panel, there is known a method in which abinder is mixed with a stimulable phosphor substance and the resultingmixture is coated on a support. However, this method may lower thepurity of a stimulable phosphor substance causing decreasing theefficiency of excitation light penetration and stimulated emission, andresulting in deterioration of image qualities such as sharpness andgranularity of recorded images. Therefore, a method to form a stimulablephosphor substance layer by means of a vapor-accumulating method (or agas phase accumulation method) has been developed to improve imagequality of recorded images (for example, refer to a Patent Literature1). In this method, since a stimulable phosphor substance layer containsonly a stimulable phosphor substance without a binder, the efficiency ofexcitation light penetration and stimulated emission is improvedresulting in obtaining images of high quality.

A conventional manufacturing method of a radiograph image conversionpanel by a vapor-accumulating method will be now explained referring toFIG. 4.

In a vapor-accumulating method, a stimulable phosphor substance isaccumulated on a support by means of evaporation or sputtering, and, forexample, evaporation system 10 shown in FIG. 4 has been utilized in caseof an evaporation method. Evaporation system 10 contains vacuum chamber12 equipped with vacuum pump 11, vapor source 13, and supporttransporting mechanism 14 which supports support S as well as transportssupport S back and forth against vapor source 13 in the horizontaldirection in said vacuum chamber 12. Further, in this evaporation system10, slit plate 15 is installed between vapor source 13 and support S torestrict evaporation onto support S, while transferring support S.

In this evaporation system 10, a stimulable phosphor substance layer canbe formed nearly uniformly onto all over support S by evaporating vaporof a stimulable phosphor substance which has passed through slit 15 fromvapor source onto support S.

A radiographic image conversion panel utilized in this radiographicimage recording and reproducing method contains a support and astimulable phosphor substance layer provided on the support. As astimulable phosphor substance, utilized is one which comprises an alkalihalide such as CsBr as a mother substance being activated with Eu, andit is considered that an X-ray conversion efficiency can be improved,which has been impossible heretofore, specifically by employing Eu as anactivator.

Further, there is a correlation between the concentration of anactivator and the luminance, and the higher is the concentration of anactivator, the higher is the sensitivity. And the sensitivity issaturated at the limiting concentration of an activator at whichexcitation light can penetrate into the phosphor substance layer andmake the accumulated energy to release at the time of reading.Therefore, the more non-uniform is the concentration of an activator,the more uneven is the sensitivity.

Therefore, by making the concentrations of an activator (a mol ratio ofan activator to a mother substance) of arbitrary two points in aphosphor substance layer into a predetermined range, developed has beena radiographic image conversion panel which has an improved sensitivityas well as can provide radiographic images of high image quality (referto patent literature 2).

[Patent Literature 1] Japanese Patent Publication Open to PublicInspection (JP-A) No. 2002-214397.

[Patent Literature 2] JP-A No. 2003-28994

SUMMARY OF THE INVENTION

Since a stimulable phosphor substance layer absorbs radiation andaccumulate the energy, the thicker is the layer thickness of astimulable phosphor substance layer, the higher becomes the sensitivity,and the sensitivity is saturated at a certain layer thickness at whichradiation energy accumulated in a stimulable phosphor substance is ableto be released.

However, in evaporation system 10 of the above constitution, vaporgenerated from vapor source 13 may proceed irregularly from slit 15 tothe side of support S to cause unevenness in the layer thickness of astimulable phosphor substance layer. Therefore, a higher sensitiveportion and a lower sensitive portion are generated locally on a panelresulting in sensitivity unevenness.

On the other hand, since the expansion factor of a stimulable phosphorsubstance layer containing CsBr is large, stress is generated on asupport. Therefore, balance of stress is lost when the layer thicknessis uneven depending on the direction, and there has been caused aproblem of bending of a panel in which a stimulable phosphor substancelayer is formed on a support. In particular, when a support is formed byaccumulating a plurality of sheets of a carbon fiber reinforced resinsheet is applied, bending along the direction of carbon fibers in thesupport results. A panel having a bend is weak against impact and oftengenerate cracks in a stimulable phosphor substance layer. Further,sensitivity unevenness may be caused due to bending.

An object of the invention is to provide a radiographic image conversionpanel having a decreased bending property and a decreased sensitivityunevenness.

An embodiment of the present invention includes a radiographic imageconversion panel containing a substrate having thereon a phosphor layerformed by a vapor-accumulating method,

-   -   wherein the phosphor layer has a small amount of a thickness        distribution, the thickness distribution being defined by the        following formula:        ((D_(max)−D_(min))/(D_(max)+D_(min)))×100,    -   provided that D_(max) is a maximum thickness of the phosphor        layer; and D_(min) is a minimum thickness of the phosphor layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a drawing to show a radiographic image conversion panelaccording to an embodiment of the present invention.

FIG. 2 is a cross-sectional drawing to show a brief constitution of anevaporation system according to the present invention.

FIG. 3 (a) is a drawing to show an example the layer thicknessdistribution of which is isotropic. FIGS. 3 (b) and 3 (c) are drawingsto show examples the layer thickness distributions of which areanisotropic.

FIG. 4 is a cross-sectional drawing to show a brief constitution of aconventional evaporation system.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

-   1. An embodiment of the present invention includes a radiographic    image conversion panel containing a substrate having thereon a    phosphor layer formed by a vapor-accumulating method,    -   wherein the phosphor layer has a thickness distribution of not        more than ±20%, the thickness distribution being defined by the        following formula:        ((D_(max)−D_(min))/(D_(max)+D_(min)))×100,    -   provided that D_(max) is a maximum thickness of the phosphor        layer; and D_(min) is a minimum thickness of the phosphor layer.-   2. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 1,    -   wherein the thickness distribution of the phosphor layer is        isotropic from a center of the radiographic image conversion        panel.-   3. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 2,    -   wherein the thickness distribution is not more than ±15%.-   4. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 2,    -   wherein the thickness distribution is not more than ±10%.-   5. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 2,    -   wherein the thickness distribution is not more than ±5%.-   6. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 2,    -   wherein the phosphor layer contains an alkali metal halide        stimulable phosphor represented by Formula (I):        M1X. aM2X′₂bM3X″₃: eA  Formula (I)        -   wherein, M1 represents an alkali metal atom selected from            the-group consisting of Li, Na, K, Rb and Cs; M2 represents            a divalent metal atom selected from the group consisting of            Be, Mg, Ca, Sr, Ba, Zn, Cd, Cu and Ni; M3. represents a            trivalent metal atom selected from the group consisting of            Sc, Y, La, Ce, Pr, Nd, Pm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb,            Lu, Al, Ga and In, X, X′ and X″ each represent independently            a halogen atom selected from the group consisting of F, Cl,            Br and I; A represents a metal atom selected from the group            consisting of Eu, Tb, In, Ce, Tm, Dy, Pr, Ho, Nd, Yb, Er,            Gd, Lu, Sm, Y, Ti, Na, Ag Cu and Mg; and a, b and e each            represents a number in a range of 0≦a <0.5, 0≦b<0.5 and            0<e<1.0, respectively.-   7. Another embodiments of the present invention includes a method of    producing the radiographic image conversion panel of Item 2, which    comprises:    -   placing the phosphor in a vapor source in a vacuum chamber of an        evaporating apparatus;    -   heating the vapor source so as to deposit the phosphor onto the        substrate which is held by a supporting member in the vacuum        chamber,        -   wherein the substrate is rotated during the heating with            respect to the vapor source by the supporting member which            is provided with a rotation mechanism.-   8. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 1,    -   wherein the thickness distribution of the phosphor layer is        isotropic from a center of the radiographic image conversion        panel, and the phosphor layer has a thickness variation        coefficient of not more than 40%, the thickness variation        coefficient being defined by the following formula:        (D _(dev) /D _(av))×100,    -   provided that D_(av) is an average thickness of the phosphor        layer; and D_(dev) is a standard deviation of thickness of the        phosphor layer.-   9. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 8, wherein the phosphor    layer has the thickness variation coefficient of not more than 30%.-   10. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 8, wherein the phosphor    layer has the thickness variation coefficient of not more than 20%.-   11. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 8, wherein the phosphor    layer has the thickness variation coefficient of not more than 10%.-   12. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 8,    -   wherein the phosphor layer contains an alkali metal halide        stimulable phosphor represented by Formula (I).-   13. Another embodiments of the present invention includes a method    of producing the radiographic image conversion panel of Item 8,    which comprises:    -   placing the phosphor in a vapor source in a vacuum chamber of an        evaporating apparatus;    -   heating the vapor source so as to deposit the phosphor onto the        substrate which is held by a supporting member in the vacuum        chamber,        -   wherein the substrate is rotated during the heating with            respect to the vapor source by the supporting member which            is provided with a rotation mechanism.-   14. Another embodiments of the present invention includes a    radiographic image conversion panel comprising a substrate having    thereon a phosphor layer formed by a vapor-accumulating method, the    phosphor containing a mother component and an activator,    -   wherein a density variation coefficient of the activator in a        surface direction of the phosphor layer is not more than 40%.-   15. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 14,    -   wherein the density distribution of the activator in the        phosphor layer is isotropic from a center of the radiographic        image conversion panel.-   16. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 15, wherein the density    variation coefficient of the activator in the phosphor layer is not    more than 30%.-   17. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 15, wherein the density    variation coefficient of the activator in the phosphor layer is not    more than 20%.-   18. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 15, wherein the density    variation coefficient of the activator in the phosphor layer is not    more than 10%.-   19. The radiographic image conversion panel of Item 15,    -   wherein the phosphor layer contains an alkali metal halide        stimulable phosphor represented by Formula (I).-   20. Another embodiments of the present invention includes a method    of producing the radiographic image conversion panel Of Item 15,    which comprises:    -   placing the phosphor in a vapor source in a vacuum chamber of an        evaporating apparatus;    -   heating the vapor source so as to deposit the phosphor onto the        substrate which is held by a supporting member in the vacuum        chamber,        -   wherein the substrate is rotated during the heating with            respect to the vapor source by the supporting member which            is provided with a rotation mechanism.-   21. Another embodiments of the present invention includes a    radiographic image conversion panel comprising a substrate having    thereon a phosphor layer formed by a vapor-accumulating method, the    phosphor containing a mother component and an activator,    -   wherein a density variation coefficient of the activator in a        depth direction of the phosphor layer is not more than 40%.-   22. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 21,    -   wherein a density distribution of the activator in the phosphor        layer is isotropic from a center of the radiographic image        conversion panel.-   23. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 22, wherein the density    variation coefficient of the activator in the phosphor layer is not    more than 30%.-   24. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 22, wherein the density    variation coefficient of the activator in the phosphor layer is not    more than 20%.-   25. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 22, wherein the density    variation coefficient of the activator in the phosphor layer is not    more than 10%.-   26. Another embodiments of the present invention includes a    radiographic image conversion panel of Item 22,    -   wherein the phosphor layer contains an alkali metal halide        stimulable phosphor represented by Formula (I).-   27. Another embodiments of the present invention includes a method    of producing the radiographic image conversion panel of Item 22,    which comprises:    -   placing the phosphor in a vapor source in a vacuum chamber of an        evaporating apparatus;    -   heating the vapor source so as to deposit the phosphor onto the        substrate which is held by a supporting member in the vacuum        chamber,        -   wherein the substrate is rotated during the heating with            respect to the vapor source by the supporting member which            is provided with a rotation mechanism.

According to an embodiment of the present invention, since a phosphorsubstance layer is provided so as to have a layer thickness-distributionof a phosphor substance layer of not more than ±20% and a layerthickness distributed to have the same thickness concentric circularfrom the center of a phosphor substance layer, it is possible to makethe layer thickness more uniform to depress sensitivity unevenness aswell as to cancel stress generated on a panel by formation of a phosphorsubstance layer resulting in depression of bending of the panel.

According to an embodiment of the present invention, since a phosphorsubstance layer is provided so as to have a layer thickness distributionof a phosphor substance layer of not more than ±15%, it is possible tomake the layer thickness more uniform resulting in further depression ofsensitivity unevenness.

According to an embodiment of the present invention, since a phosphorsubstance layer is provided so as to have a layer thickness distributionof a phosphor substance layer of not more than ±10%, it is possible tomake the layer thickness more uniform resulting in further depression ofsensitivity unevenness.

According to an embodiment of the present invention, since a phosphorsubstance layer is provided so as to have a layer thickness distributionof a phosphor substance layer of not more than ±5%, it is possible tomake the layer thickness more uniform resulting in remarkably depressionof sensitivity unevenness.

According to an embodiment of the present invention, since a coefficientof variation of a layer thickness in the phosphor substance layer is notmore than 40% and a layer thickness is distributed concentric circularlyfrom the center of the phosphor substance layer, it is possible to makethe layer thickness more uniform resulting in depression of sensitivityunevenness as well as to cancel stress generated on a panel by formationof a phosphor substance layer resulting in depression of bending of thepanel.

According to an embodiment of the present invention, since a coefficientof variation of a layer thickness in the phosphor layer is not more than30%, it is possible to make the layer thickness more uniform resultingin further depression of sensitivity unevenness.

According to an embodiment of the present invention, since a coefficientof variation of a layer thickness in the phosphor layer is not more than20%, it is possible to make the layer thickness more uniform resultingin further depression of sensitivity unevenness.

According to an embodiment of the present invention, since a coefficientof variation of a layer thickness in the phosphor layer is not more than10%, it is possible to make the layer thickness more uniform resultingin further depression of sensitivity unevenness.

According to an embodiment of the present invention, it is possible toapply a stimulable phosphor substance, M1X·aM2X′₂bM3X″³:eA, representedby general formula (1) as a starting material of a phosphor substancelayer.

According to an embodiment of the present invention, since a phosphorsubstance is evaporated on a support while the support is rotated, it ispossible to form a phosphor layer on a support so as to have moreuniform layer thickness of the phosphor substance as well as aconcentric circular layer thickness distribution from the center of thephosphor substance layer. Therefore, it is possible to reduce layerthickness distribution or the coefficient of variation of the .phosphorsubstance layer as well as to compensate stress generated on a panel,resulting in manufacturing a radiographic image conversion panel havingminimum sensitivity unevenness and little bending.

In the following, the present invention will be detailed.

FIG. 1 shows radiographic image conversion panel P applied in thepresent invention.

Radiographic image conversion panel P contains a support S andstimulable phosphor substance layer R, in which prismatic crystals of astimulable phosphor substance is formed by a vapor-accumulating method,on said support S; and a protective layer to protect stimulable phosphorsubstance layer R (being not shown in the drawing) is appropriatelyprovided on this stimulable phosphor substance layer R.

A material of support S can be arbitrarily selected from commonly knownmaterials as a support of a conventional radiographic image conversionpanel, however, a support in the case of forming a phosphor substancelayer by a vapor-accumulating method are preferably quartz glass, ametal sheet comprising such as aluminum, iron, tin or chromium, a carbonfiber reinforced resin sheet comprising a sheet of carbon fibers whichare oriented in one direction and contain heat resistive resin.

Further, support S is preferably provided with resin layer Sa whichmakes the support surface smooth. Resin layer Sa preferably contains acompound such as polyimide, polyethylene terephthalate, paraffin andgraphite, and the layer thickness is preferably approximately 5-50 μm.This resin layer may be provided either on the front or the backsidesurface of support S, or may be provided on the both surfaces.

Further, a means to provide resin layer Sa on support S includes alamination method and a coating method. A lamination method is performedby use of heat rollers or pressure rollers, and preferable conditionsare heating at approximately 80-150° C., pressing at 4.90−2.94×102(N/cm) and a transport rate of 0.1-2.0 (m/sec).

In above general formula (1), M1 represents at least one type of analkali earth metal atom selected from each atom of Li, Na, K, Rb and Cs,among them preferably at least one type of atom selected from each atomof Rb and Cs and more preferably Cs atom.

Further, M2 represents at least one type of a divalent metal atomselected from each atom of Be, Mg, Ca, Sr, Ba, Zn, Cd, Cu and Ni, andamong them preferably utilized is an atom selected from Be, Mg, Ca, Srand Ba.

M3 represents at least one type of a trivalent metal atom selected fromeach atom of Sc, Y, La, Ce, Pr, Nd, Pm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb,Lu, Al, Ga and In, and among them preferably utilized is an atomselected from Y, Ce, Sm, Eu, Al, La, Gd, Lu, Ga and In.

A represents at least one type of a metal atom selected from each atomof Eu, Tb, In, Ce, Tm, Dy, Pr, Ho, Nd, Yb, Er, Gd, Lu, Sm, Y, Tl, Na,Ag, Cu and Mg, and among them preferably Eu atom.

X, X′ and X″ represent at least one type of a halogen atom selected fromF, Cl, Br and I, preferably one type of a halogen atom selected from F,Cl and Br and more preferably Br atom, with respect to emission strengthimprovement of stimulated emission of stimulable phosphor substance.

Further, in general formula (1), a, b and e each are values in ranges of0≦a<0.5, 0≦b<0.5 and 0<e<1.0, respectively, and preferably 0≦b<10⁻².

Stimulable phosphor substances represented by general formula (1) of thepresent invention are manufactured, for example, by the followingmethod.

First, the following starting materials (a), (b) and (e), as phosphorsubstance raw materials, are prepared.

Starting material (a): at least one or two types of compounds selectedfrom NaF, NaCl, NaBr, NaI, KF, KCl, KBr, KI, RbBr, RbI, CsF, CsCl, CsBrand CsI.

Starting material (b): at least one or two types of compounds selectedfrom MgF₂, MgCl₂, MgBr₂, MgI₂, CaF₂, CaCl₂, CaBr₂, CaI₂, SrF₂, SrCl₂,SrBr₂, SrI₂, BaF₂, BaCl₂, BaBr₂, BaBr₂. 2H₂O, BaI₂, ZnF₂, ZnCl₂, ZnBr₂,ZnI₂, CdF₂, CdCl₂, CdBr₂, CdI₂, CuF₂, CuCl₂, CuBr₂, CuI₂, NiF₂, NiCl₂,NiBr₂ and NiI₂.

Starting material (e): compounds containing a metal atom selected fromEu, Tb, In, Ce, Tm, Dy, Pr, Ho, Nd, Yb, Er, Gd, Lu, Sm, Y, Tl, Na, Ag Cuand Mg.

Phosphor substance starting materials, (a), (b) and (e), which areweighed so as to be the values in the ranges of a, b and e of generalformula (1), are dissolved in pure water. At this time, the startingmaterials may be sufficiently mixed by use of such as a mortar, a ballmill and a mixer mill.

Next, after adding a predetermined acid so as to adjust pH value C ofthe prepared aqueous solution at 0<C<7, water is evaporated.

Then, the mixture of stating materials obtained by evaporation of waterwas charged into a heat-resistant vessel such as a quartz crucible or analumina crucible and is burned in an electric furnace. The burningtemperature is preferably 500-1000° C. The burning time differsdepending on such as a charging amount of starting materials and aburning temperature, however, is preferably 0.5-6 hours. Further, theburning atmosphere is preferably a nitrogen gas atmosphere containing asmall amount of a hydrogen gas, a weakly reducing atmosphere such as acarbon gas atmosphere containing a small amount of carbon monoxide,neutral atmospheres such as a nitrogen atmosphere and an argonatmosphere, or a weakly oxidizing atmosphere containing a small amountof an oxygen gas.

Herein, in the case that the burned substance is taken out of anelectric furnace and ground after having been once burned in the aboveburning condition, thereafter, the burned substance powder is chargedinto a heat-resistant vessel and placed in an electric furnace to beburned again in the same condition as the above; a desired stimulableemission luminance of a stimulable phosphor substance can be obtainedalso by being taken out of an electric furnace followed by beingspontaneously cooled in air, however, the burned substance may be cooledin a weakly reducing atmosphere or a neutral atmosphere which is same asthat during burning.

Further, it is preferable that a burned substance is transferred from aheating section to a cooling section within a furnace and rapidly cooledin a weakly oxidizing atmosphere because a stimulable emission luminanceof the obtained stimulable phosphor substance can be further increased.

The stimulable phosphor substance thus manufactured is evaporated onsupport S by means of a vapor-accumulating method resulting in formationof stimulable phosphor substance layer R. As a vapor-accumulatingmethod, evaporation method, a sputtering method, a CVD (Chemical VaporDeposition) method, an ion-plating method and other methods can beemployed and a evaporation method is specifically preferable in thepresent invention.

In the following, explained will be an example of evaporating astimulable phosphor substance on support S by an evaporation methodsuitable to the present invention.

In the evaporation, evaporation system 1 shown in FIG. 2 is employed. Asshown in FIG. 2, evaporation system 1 contains vacuum chamber 2, vacuumpump 3 which performs evacuation and air introduction of the vacuumchamber 2, vapor source 4 which is arranged in vacuum chamber 2 andevaporates a vapor on support S, and support rotating mechanism 5 whichholds support S and rotates support S against vapor source 4.

Vapor source 4 may contain an alumina crucible wound with a heater or aheater comprising a boat or a high melting temperature metal, toaccommodate a stimulable phosphor substance to be heated by a resistanceheating method Further, a method to heat a stimulable phosphor substancemay be a heating by means of electron beam or a heating by means of highfrequency induction in addition to a resistance heating method, however,a resistance heating is preferred in the present invention with respectto a relatively simple constitution and easy handling as well as beingapplicable easily and to grate many substances. Further, vapor source 4may be a molecular beam source by means of a molecular beam epitaxialmethod.

Support rotating mechanism 5 contains, for example, support holder 5 ato hold support S, rotation axis 5 b to rotate said support holder 5 aand motor (being not shown in the figure) which is arranged outsidevacuum chamber 2 and works as a driving source of rotating axis 5 b.

Herein, support holder 5 a is preferably equipped with a heater (beingnot shown in the figure) to heat support S. Heating support S makes itpossible to detach and eliminate absorbed substances from the surface ofsupport S, resulting in generation of an impurity layer between thesurface of support S and stimulable phosphor substance layer R, or toenhance adhesion and adjust the layer properties.

Further, a shutter (being not shown in the figure) may be providedbetween support S and vapor source 4 to shield the space from vaporsource to support S. The shutter can prevent substances other than theevaporation objective, which have adhered on the surface of a stimulablephosphor substance, from adhering on a support by being evaporated atthe initial stage of evaporation.

Next, an evaporation method by use of evaporation system 1 will beexplained.

First, support S is held on support holder 5 a. Next, the inside ofvacuum chamber 2 is evacuated. Thereafter, support holder 5 a is rotatedagainst the vapor source by use of support rotating mechanism 5, and astimulable phosphor substance is evaporated from heated vapor source 4when a vacuum degree inside vacuum chamber 2 reaches a vacuum degreepossible for evaporation resulting in growth of a desired thickness ofthe stimulable phosphor substance on the surface of support S. In thiscase, the distance between support S and vapor source 4 is adjustedbetween 100-1500 mm.

Further, in the above evaporation process, it is possible to performevaporation dividing into plural times to form stimulable phosphorsubstance layer R. In an evaporation process, it is also possible toform a stimulable phosphor substance layer simultaneously withsynthesizing an objective stimulable phosphor substance on support S byco-evaporation by utilizing a plural number of resistance heaters orelectron beams.

Further, in an evaporation method, materials to be subjected toevaporation (a support, a protective layer or an intermediate layer) maybe appropriately cooled or heated at the time of evaporation. Further, astimulable phosphor substance layer may be subjected to a heat treatmentafter finishing evaporation. And, in an evaporation method, applied maybe a reactive evaporation in which evaporation is performed byappropriately introducing a gas such as O₂ and H₂.

The thickness of formed stimulable phosphor substance layer R differsdepending on application purposes of a radiographic image conversionpanel and types of a stimulable phosphor substance, however, is in arange of 50-2000 μm, preferably 50-1000 μm and more preferably 100-800μm, with respect to achieving the effects of the present invention.

Further, for forming stimulable phosphor substance layer R by the aboveevaporation method, the temperature of support S, on which stimulablephosphor substance layer R is formed, is preferably set at roomtemperature (RT) to. 300° C. and more preferably at 50-200° C.

A protective layer may be appropriately provided so as to coverstimulable phosphor substance layer R after which has been formed in theaforesaid manner. A protective layer may be formed by directly coating aprotective layer coating solution on the surface of stimulable phosphorsubstance layer R, or by adhering a protective layer separately preparedin advance onto stimulable phosphor substance layer R.

As materials for the protective layer, applicable are general protectivelayer materials such as cellulose acetate, nitro cellulose,polymethylmethacrylate, polyvinyl butyral, polyethylene, polycarbonate,polyvinyl formal, polycarbonate, polyester, polyethylene terephthalate,polyethylene, polyvinylidene chloride, nylon, polytetrafluoroethylene,polytrifluoro monochloroehylene, atetrafluoroethylene-hexafluorepropylene copolymer, a vinlidenechloride-vinyl chloride copolymer and a vinylidenechloride-acrylonitrile copolymer. In addition to this, a transparentglass substrate may be employed as a protective layer.

Further, as the protective layer, inorganic substances such as SiC,SiO₂, SiN and Al₂O₃ may be accumulated by an evaporation method or asputtering method. The thickness of these protective layer is preferably0.1-2000 μm.

EXAMPLES

In the following, the present invention will be specifically explainedreferring to examples, however, embodiments of this is not limitedthereto.

(Preparation of Support)

A plural number of carbon fiber reinforced resin sheets beingaccumulated are heated at 130° C. and pressed at a pressure of 100 N/cmto prepare support S.

(Formation of Stimulable Phosphor Substance Layer)

CsBr:0.0002 Eu as a stimulable phosphor substance was manufactured,which was evaporated on support S to form stimulable phosphor substancelayer R, resulting in manufacture of radiographic image conversionpanels of examples A-D and comparative examples 1 and 2 described below.Evaporation in examples A-D was performed by use of evaporation system 1shown in FIG. 2, and evaporation in comparative examples 1 and 2 wasperformed by use of evaporation system 10 shown in FIG. 4.

Example A

First, the above-described stimulable phosphor substance (CsBr:0.0002Eu)as an evaporation material was filled into a resistance heating crucibleinside vapor source 4, and support S was placed at support holder 5 a.

Next, the distance between support S and vapor source 4 was adjusted to400 mm.

Successively, after the inside of evaporation system 1 was onceevacuated and an Ar gas was introduced to adjust a vacuum degree to 0.1Pa, the temperature of support S was kept at 100° C. while support S wasrotated at a rate of 10 rpm by support rotating mechanism 5. Then, thestimulable phosphor substance was evaporated onto support S by heatingthe resistance heating crucible to form a stimulable phosphor substancelayer, and evaporation was finished when the thickness of the stimulablephosphor layer reached approximately 500 μm. Successively, thestimulable phosphor substance layer was taken into a protective layerbag under dry air resulting in preparation of a radiographic imageconversion panel containing a stimulable phosphor substance layer beingsealed.

Example B

After arranging a stimulable phosphor substance and a support in asimilar manner to example A, the distance between support S and vaporsource 4 was adjusted to 600 mm. Thereafter, a radiographic imageconversion panel was manufactured in a similar manner to example A.

Example C

After arranging a stimulable phosphor substance and a support in asimilar manner to example A, the distance between support S and vaporsource 4 was adjusted to 800 mm. Thereafter, a radiographic imageconversion panel was manufactured in a similar manner to example A.

Example D

After arranging a stimulable phosphor substance and a support in asimilar manner to example A, the distance between support S and vaporsource 4 was adjusted to 1000 mm. Thereafter, a radiographic imageconversion panel was manufactured in a similar manner to example A.

Comparative Example 1

First, the above-described stimulable phosphor substance (CsBr:0.0002Eu)as an evaporation material was filled into a resistance heating crucibleinside vapor source 13 of evaporation system 10 (refer to FIG. 4), andsupport S was placed at support holder 14 a.

Next, the distance between support S and vapor source 13 was adjusted to400 mm.

Successively, after the inside of evaporation system 10 was onceevacuated and an Ar gas was introduced to adjust a vacuum degree to 0.1Pa, the temperature of support S was kept at 100° C. while support S wastransferred back and forth along direction A by support transfermechanism 14. Then, the stimulable phosphor substance was evaporatedonto support S by heating the resistance heating crucible to form astimulable phosphor substance layer, and evaporation was finished whenthe thickness of the stimulable phosphor layer reached approximately 500μm. Successively, the stimulable phosphor substance layer was taken intoa protective layer bag under dry air resulting in preparation of aradiographic image conversion panel containing a stimulable phosphorsubstance layer being sealed.

Comparative Example 2

After arranging a stimulable phosphor substance and a support in asimilar manner to comparative example 1, the distance between support Sand vapor source 4 was adjusted to 1000 mm. A radiographic imageconversion panel was manufactured; in a similar manner to comparativeexample 1 as for the following process.

The following evaluations were performed with respect to radiographicimage conversion panels obtained in above-described examples A-D andcomparative examples 1 and 2.

<Layer Thickness Distribution Characteristics>

With respect to the layer thickness distribution characteristics, layerthicknesses at 30 measuring points which were arranged in rows at equalintervals on a radiographic image conversion panel were measured, andmeasured points, where the layer thicknesses are nearly same, wereconnected by a curved line (this curved line is called as aniso-thickness line) to judge whether the layer thickness distribution isisotropic or anisotropic. Herein, that a layer thickness distribution isisotropic means that the layer thickness is nearly uniform at positionsof an equal distance from the center of a panel and has no distributiondepending on the directions from the center. While, that a layerthickness distribution is anisotropic means that the layer thickness hasa distribution depending on the directions from the center of a panel.

For example, it is judged to be isotropic when the iso-thickness linesspread homo-centrically (including a normal circle and an ellipse) fromthe center of a panel, as is shown in FIG. 3 (a), and it is judged to beanisotropic when the iso-thickness lines stand in a row in one directionas is shown in FIG. 3 (b) or several homo-centrically distributediso-thickness lines exist locally as is shown in FIG. 3 (c).

<Layer Thickness Distribution>

The layer thickness distribution is an index value to represent a degreeof the layer thickness distribution of a stimulable phosphor substancein a stimulable phosphor substance layer. The layer thicknessdistribution was calculated according to following equation (2) bymeasuring the maximum layer thickness D_(max) and the minimum layerthickness D_(min) in a stimulable phosphor substance layer.Layer thicknessdistribution=[(D_(max)−D_(min))/(D_(max)+D_(min))]×100(%)  (2)wherein, D_(max): the maximum layer thickness

-   -   D_(min): the minimum layer thickness        <Coefficient of Variation>

The coefficient of variation is an index value to represent a degree ofa layer thickness distribution of a stimulable phosphor substance in astimulable phosphor substance layer, similar to the layer thicknessdistribution. The coefficient of variation was calculated by followingequation (3) after measuring the layer thicknesses of a stimulablephosphor substance layer at 50 measurment points arranged in rows atequal intervals on a radiographic image conversion panel followed bydetermining an average layer thickness D_(av) of each measurement pointand a standard deviation D_(dev) of the layer thickness.Coefficient of variation=(D_(dev)/D_(av))×100(%)  (3)wherein, D_(dev): a standard deviation of the layer thickness

-   -   D_(av): an average layer thickness        <Coefficient of Variation of Activator Concentration within        Phosphor Substance Layer Plane>

Each 0.2 g of the phosphor substance from arbitrary 30 points of aphosphor substance layer of the prepared radiographic image conversionpanel was collected, and after this has been dissolved in an aqueoushydrochloric solution, the Eu concentration was determined from thecalibration curve of an ICP measurement. The calibration curve was drawnby ICP measurement of a solution in which CsBr powder without containingEu was dissolved after addition of an suitable amount of a Eu 1000 ppmstandard solution for atomic absorption (manufactured by Kanto ChemicalsCo., Ltd.). Further, a standard deviation was calculated with respect tothe Eu concentrations of 30 points, and the relative standard deviationwas divided by an average of activator concentrations at 30 points todetermine a coefficient of variation represented by following equation(2).A coefficient of variation=a standard deviation of activatorconcentrations in the plane/an average of activator concentrations  (2)<Coefficient of Variation of Activator Concentration in the DepthDirection of Phosphor Substance Layer>

The prepared radiographic image conversion panel was broken at anarbitrary portion by applying a physical force. Then, arbitrary 30points in the broken cross section, specifically 5 points in the planedirection and 6 points in the depth direction, were selected, and a CsBrsignal and a Eu signal each were measured in a region of 60 μm square ofthe selected points. Further, a mol ratio of Eu/CsBr was calculated,standard deviation with respect to concentration of the depth directionwas determined, and the relative standard deviation was divided by anaverage of activator concentrations of 30 points to obtain a coefficientof variation represented by following equation (3).A coefficient of variation=a standard deviation of activatorconcentrations of the depth direction/an average of activatorconcentration<Sensitivity Unevenness>

After radiation was uniformly irradiated on a radiographic imageconversion panel from the support side, which was opposite to astimulable phosphor substance, at a bulb voltage of 80 kVp, saidradiographic image conversion panel P was excited by scanning with He-Nelaser light (wavelength of 633 nm). Then, stimulated emission irradiatedfrom the stimulable phosphor substance layer was accepted by a receptor(a photomultiplier having a spectral sensitivity of S-5), with respectto 25 measurement points which are in rows at an equal interval on saidradiographic image conversion panel, to measure the strength, andmaximum strength K_(max) and minimum strength K_(min) among measuredstrength of each measurement point and average strength K_(av) of eachmeasured strength were determined resulting in calculation of thesensitivity unevenness according to following equation (4).Sensitivity unevenness=((K_(max)−K_(min))/K_(av))×100(%)  (4)wherein, K_(max): the maximum strength

-   -   K_(min): the minimum strength    -   K_(av): the average strength        <Relative Sensitivity>

The relative sensitivity represents a relative sensitivity against aradiographic image..conversion panel of comparative example 1 based on astimurable irradiation strength of radiographic image conversion panel1. In a similar manner to the case of sensitivity unevenness, strengthof stimulated emission irradiated from the stimulable phosphor substancelayer was measured with respect to 25 measurement points, which wasdesignated as luminance to determine average luminance K₁ in comparativeexample 1 and average luminance K_(n) in each examples A-D orcomparative example 2 respectively, resulting in calculation of therelative sensitivity according to following equation (5).Relative sensitivity=(K_(n)/K₁)×100  (5)wherein, K₁: an average luminance in comparative example 1

-   -   K_(n): an average luminance in examples A-D or comparative        example 2        <Bending>

The amount of bending of a radiographic image conversion panel wasmeasured with respect to the two upside corners with a clearance gagewhen the radiographic image conversion panel was leaned against a highlyupright stainless steel plate at an angle of 5 degree, and the panel wasrotated by 180 degree to further measure the two upside corners of thepanel with a clearance gage, resulting in determining the maximum valueto be a bending amount (mm).

<Anti-Impact Property>

After dropping a steel ball of 500 g weight onto a radiographic imageconversion panel from 20 cm height, the state of cracking was visuallyobserved based on the following evaluation criteria. Further, after aradiation having a bulb voltage of 80 kVp was irradiated on theradiographic image conversion panel, the panel was excited by beingscanned with He-Ne laser light (wavelength of 633 nm) to convertstimulated emission emitted from a phosphor substance layer into anelectric signal (an image signal). Then the converted image signal wasdisplayed out on a display means or printed out by a printing means andthe output image was visually evaluated according to the followingevaluation criteria.

The evaluation criteria of the anti-impact property are as follows.

A: No cracks were observed and the image was uniform without imageunevenness.

B: No cracks were observed and the image quality was barelydeteriorated.

C: Some cracks were observed and an image lack was observed, however, itwas allowed in practical application.

D: Some cracks were observed and a definite image lack was observed,which was a problem in practical application.

The above evaluation results are shown in Table 1. TABLE 1 Support-evaporation Coefficient source Thickness Thickness of Sensitivity Anti-distance distribution distribution variation unevenness Relative Bendingimpact Support (mm) characteristics (%) (%) (%) sensitiveity (mm)property Example A Rotation 400 Isotropic ±18 26 17 101 0.6 B Example BRotation 600 Isotropic ±13 15 13 103 0.5 B Example C Rotation 800Isotropic ±8 8 10 105 0.3 A Example D Rotation 1000 Isotropic ±4 3 8 1080.2 A Comparison 1 Transfer 400 Anisotropic ±40 50 42 100 4.0 D(standard) Comparison 2 Transfer 1000 Anisotropic ±30 45 33  95 4.7 D

It is clear from table 1 that radiographic image conversion panels(examples A-D), in which the distance between support S and vapor source4 is adjusted to not less than 400 mm and evaporation is performed whilerotating Support S, can decrease layer thickness distribution to notmore than ±20%. The sensitivity unevenness is-decreased to not more than±20%, which is one half of those of comparative examples 1 and 2, whenthe layer thickness distribution is decreased to not more than ±20%,resulting in improvement of the image quality. Similarly, radiographicimage conversion panels of examples A-D can decrease a coefficient ofvariation to not more than 40% which remarkably decreases sensitivityunevenness as small as not more than 30%.

Further, as the layer thickness distribution is lowered to not more than±20%, to not more than ±15%, to not more than ±10% and to not more than±5%, the sensitivity unevenness is decreased as well as the relativesensitivity is increased, and in particular, example D, the layerthickness distribution of which is less than ±5%, the sensitivityunevenness is remarkably decreased and the relative sensitivity showsthe maximum value among the examples. Similarly, it has been proved thatas the coefficient of variation is decreased to not more than 40%, tonot more than 30%, to not more than 20% and to not more than 10%, thesensitivity unevenness decreases as well as any of relativesensitivities is improved.

On the other hand, in examples A-D, in which evaporation was performedwhile rotating support S, the layer thickness distributioncharacteristics are all provided with an-isotropic property, and thebending is extremely small as not more than 1.0 mm compared tocomparative examples 1 and 2. Further, in examples A-D provided with anisotropic property also with respect to the anti-impact property, cracksare hardly observed and, in particular, examples C and D, the layerthickness distributions of which are small, can even achieve excellentimage quality. While, in comparative examples 1 and 2, even incomparative example having an isotropic property, cracks are observedand evaluation rank of an anti-impact property is low.

The radiographic image conversion panel of the present invention havinga low amount of a density variation coefficient of the activator in asurface direction of the phosphor layer, and the radiographic imageconversion panel of the present invention having a density distributionof the activator in the phosphor layer being isotropic from a center ofthe radiographic image conversion panel were proved to exhibit a highanti-impact property.

The aforesaid effect is considered to be produced by an increasedisotropic property of the panel which results in a decreased stress inthe panel. The decreased stress in the panel is considered to achieve adecreased bending which produced a high anti-impact property. Theincreased isotropic property of the panel can be achieved by extendingthe distance between the support and the vapor source.

1-27. (canceled)
 28. A radiation image conversion panel comprising asubstrate having thereon a phosphor layer formed by a vapor-accumulationmethod, wherein the phosphor layer has a thickness distribution of notmore than +/−20%, the thickness distribution being defined by thefollowing formula:((D_(max)−D_(min))/(D_(max))+D_(min)))×100, provided that D_(max) is amaximum thickness of the phosphor layer; and D_(min) is a minimumthickness of the phosphor layer; and the thickness distribution of thephosphor layer is isotropic from a center of the radiation imageconversion panel.
 29. The radiation image conversion panel of claim 1,wherein the thickness distribution is not more than +/−15%.
 30. Theradiation image conversion panel of claim 1, wherein the thicknessdistribution is not more than +/−5%.
 31. The radiation image conversionpanel of claim 1, wherein the phosphor layer contains an alkali metalhalide stimulable phosphor represented by Formula (I):M1X.aM2X′₂BM3X″₃: eA  (Formula I) wherein, M1 represents an alkali metalatom selected from the group consisting of Li, Na, K, Rb and Cs; M2represents a divalent metal atom selected from the group consisting ofBe, Mg, Ca, Sr, Ba, Zn, Cd, Cu and Ni; M3 represents a trivalent metalatom selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Pm,Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Al, Ga and In, X, X′ and X″ eachrepresent independently a halogen atom selected from the groupconsisting of F, Cl, Br and I; A represents a metal atom selected fromthe group consisting of Eu, Tb, In, Ce, Tm, Dy, Pr, Ho, Nd, Yb, Er, Gd,Lu, Sm, Y, TI, Na, Ag, Cu and Mg; and a, b and e each represents anumber in a range of 0≦a<0.5, 0≦b<0.5 and 0≦e<1.0, respectively.
 32. Amethod of producing the radiation image conversion panel of claim 1,comprising: placing the phosphor in a vapor source in a vacuum chamberof an evaporating apparatus; and heating the vapor source so as todeposit the phosphor onto the substrate which is held by a supportingmember ion the vacuum chamber; wherein the substrate is rotated duringthe heating with respect to the vapor source by the supporting memberwhich is provided with a rotation mechanism.
 33. The radiation imageconversion panel of claim 1, wherein the thickness distribution of thephosphor layer is isotropic from a center of the radiation imageconversion panel, and the phosphor layer has a thickness variationcoefficient of not more than 40%, the thickness variation coefficientbeing defined by the following formula:(D_(dev)/D_(av))×100 provided that D_(av) is an average thickness of thephosphor layer, and D_(dev) s a standard deviation of thickness of thephosphor layer.
 34. The radiation image conversion panel of claim 33,wherein the phosphor layer has a thickness variation coefficient of notmore than 30%.
 35. The radiation image conversion panel of claim 33,wherein the phosphor layer has a thickness variation coefficient of notmore than 20%.
 36. The radiation image conversion panel of claim 33,wherein the phosphor layer has a thickness variation coefficient of notmore than 10%.
 37. The radiation image conversion panel of claim 33,wherein the phosphor layer contains an alkali metal halide stimulablephosphor of Formula I:M1X.aM2X′₂BM3X″₃: eA  (Formula I) wherein, M1 represents an alkali metalatom selected from the group consisting of Li, Na, K, Rb and Cs; M2represents a divalent metal atom selected from the group consisting ofBe, Mg, Ca, Sr, Ba, Zn, Cd, Cu and Ni; M3 represents a trivalent metalatom selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Pm,Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Al, Ga and In, X, X′ and X″ eachrepresent independently a halogen atom selected from the groupconsisting of F, Cl, Br and I; A represents a metal atom selected fromthe group consisting of Eu, Tb, In, Ce, Tm, Dy, Pr, Ho, Nd, Yb, Er, Gd,Lu, Sm, Y, TI, Na, Ag, Cu and Mg; and a, b and e each represents anumber in a range of 0≦a<0.5, 0≦b<0.5 and 0≦e<1.0, respectively.
 38. Amethod of producing the radiation image conversion panel of claim 33,comprising: placing the phosphor in a vapor source in a vacuum chamberof an evaporating apparatus; and heating the vapor source so as todeposit the phosphor onto the substrate which is held by a supportingmember ion the vacuum chamber; wherein the substrate is rotated duringthe heating with respect to the vapor source by the supporting memberwhich is provided with a rotation mechanism.